Silicon wet bulk micromachining for MEMS / Prem Pal, Kazuo Sato.
By: Pal, Prem [author.]
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Contributor(s): Sato, Kazuo [author.].
Material type: 
BookPublisher: Singapore : Pan Stanford Publishing Pte. Ltd., [2017]Copyright date: ©2017Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9781315364926; 9789814613736; 9781315322308.Other title: Silicon wet bulk micromachining for microelectromechanical systems.Subject(s): Microelectromechanical systems | MicromachiningAdditional physical formats: Print version: : No titleDDC classification: 621.381 Online resources: Click here to view.
Contents:
1. A brief introduction of the crystal structure -- 2. Brief overview of silicon wafer manufacturing and microfabrication techniques -- 3. Isotropic etching of silicon and related materials -- 4. KOH-based anisotropic etching -- 5. TMAH-based anisotropic etching -- 6. Convex and concave corners in silicon wet bulk micromachining -- 7. Alignment of mask patterns to crystallographic directions -- 8. Simple to complex structures using wet bulk micromachining.
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1. A brief introduction of the crystal structure -- 2. Brief overview of silicon wafer manufacturing and microfabrication techniques -- 3. Isotropic etching of silicon and related materials -- 4. KOH-based anisotropic etching -- 5. TMAH-based anisotropic etching -- 6. Convex and concave corners in silicon wet bulk micromachining -- 7. Alignment of mask patterns to crystallographic directions -- 8. Simple to complex structures using wet bulk micromachining.
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