Yoo, Chue San.

Semiconductor manufacturing technology [electronic resource] / Chue San Yoo. - Singapore : World Scientific Publishing Co. Pte Ltd., ©2008. - 1 online resource (484 p.) : ill. - Advanced series in electrical and computer engineering ; v. 13 .

Includes bibliographical references and index.

"This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format."--Publisher's website.


Mode of access: World Wide Web.
System requirements: Adobe Acrobat Reader.

9789812790958




Semiconductors--Design and construction.
Semiconductor industry.
Electronic books.

TK7871.85 / .Y66 2008

621.38152