Senturia, Stephen D.
Microsystem Design - New York Springer 2001 - p.689
9781475774580
Microfabrication
Elasticity
Fluids
Noise
621.381 S28M
Microsystem Design - New York Springer 2001 - p.689
9781475774580
Microfabrication
Elasticity
Fluids
Noise
621.381 S28M