Multilayer Integrated Film Bulk Acoustic Resonators (Record no. 52016)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 02892nam a22004935i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 978-3-642-31776-7 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20200420220223.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 120827s2013 gw | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9783642317767 |
| -- | 978-3-642-31776-7 |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 620.5 |
| 100 1# - AUTHOR NAME | |
| Author | Zhang, Yafei. |
| 245 10 - TITLE STATEMENT | |
| Title | Multilayer Integrated Film Bulk Acoustic Resonators |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | X, 154 p. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | Introduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education's Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang's research group. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Surfaces. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Chen, Da. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://dx.doi.org/10.1007/978-3-642-31776-7 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Berlin, Heidelberg : |
| -- | Springer Berlin Heidelberg : |
| -- | Imprint: Springer, |
| -- | 2013. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 347 ## - | |
| -- | text file |
| -- | |
| -- | rda |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Solid state physics. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Nanotechnology. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Materials |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Thin films. |
| 650 14 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Engineering. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Nanotechnology and Microengineering. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Surfaces and Interfaces, Thin Films. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Solid State Physics. |
| 912 ## - | |
| -- | ZDB-2-ENG |
No items available.