Integration of Functional Oxides with Semiconductors (Record no. 56739)
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000 -LEADER | |
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fixed length control field | 03348nam a22005295i 4500 |
001 - CONTROL NUMBER | |
control field | 978-1-4614-9320-4 |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20200421112043.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 140220s2014 xxu| s |||| 0|eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
ISBN | 9781461493204 |
-- | 978-1-4614-9320-4 |
082 04 - CLASSIFICATION NUMBER | |
Call Number | 621.381 |
100 1# - AUTHOR NAME | |
Author | Demkov, Alexander A. |
245 10 - TITLE STATEMENT | |
Title | Integration of Functional Oxides with Semiconductors |
300 ## - PHYSICAL DESCRIPTION | |
Number of Pages | X, 278 p. 146 illus., 113 illus. in color. |
505 0# - FORMATTED CONTENTS NOTE | |
Remark 2 | Introduction -- Critical issues in Oxide-Semiconductor Heteroepitaxy -- Predictive Engineering of Semiconductor-Oxide Interfaces -- Crystalline Functional Oxide Growth Methods -- Thin Oxide Film Characterization Methods -- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy -- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates -- Other Epitaxial Oxides on Semiconductors -- Outlook and Parting Thoughts -- Appendices. |
520 ## - SUMMARY, ETC. | |
Summary, etc | This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges, and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. This book also: �         Discusses why semiconductor substrates are an excellent integration platform for making hybrid logic/sensor devices �         Provides a brief introduction to the methods accessible to non-experts, before going into details of interest to the experts �         Includes a detailed glossary that explains the specialized terminology and provides insight into the terminology and how it's used. |
700 1# - AUTHOR 2 | |
Author 2 | Posadas, Agham B. |
856 40 - ELECTRONIC LOCATION AND ACCESS | |
Uniform Resource Identifier | http://dx.doi.org/10.1007/978-1-4614-9320-4 |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | eBooks |
264 #1 - | |
-- | New York, NY : |
-- | Springer New York : |
-- | Imprint: Springer, |
-- | 2014. |
336 ## - | |
-- | text |
-- | txt |
-- | rdacontent |
337 ## - | |
-- | computer |
-- | c |
-- | rdamedia |
338 ## - | |
-- | online resource |
-- | cr |
-- | rdacarrier |
347 ## - | |
-- | text file |
-- | |
-- | rda |
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Engineering. |
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Semiconductors. |
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Electronics. |
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Microelectronics. |
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Optical materials. |
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Electronic materials. |
650 14 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Engineering. |
650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Electronics and Microelectronics, Instrumentation. |
650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Optical and Electronic Materials. |
650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Semiconductors. |
912 ## - | |
-- | ZDB-2-ENG |
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