Plasma electronics : (Record no. 70114)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01871cam a2200337Ii 4500 |
| 001 - CONTROL NUMBER | |
| control field | 9781482222104 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 180331t20152015fluad ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781482222104 |
| -- | (e-book : PDF) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | (hardback) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | (paperback) |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 621.044 |
| -- | M235 |
| 100 1# - AUTHOR NAME | |
| Author | Makabe, T. |
| 245 10 - TITLE STATEMENT | |
| Title | Plasma electronics : |
| Sub Title | applications in microelectronic device fabrication / |
| 250 ## - EDITION STATEMENT | |
| Edition statement | Second edition. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 online resource |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | chapter 1. Introduction -- chapter 2. Phenomenological description of the charged particle transport -- chapter 3. Macroscopic plasma characteristics -- chapter 4. Elementary processes in gas phase and on surfaces -- chapter 5. The Boltzmann equation and transport equations of charged particles -- chapter 6. General properties of charged particle transport in gases -- chapter 7. Modeling of nonequilibrium (low temperature) plasmas -- chapter 8. Numerical procedure of modeling -- chapter 9. Capacitively coupled plasma -- chapter 10. Inductively coupled plasma -- chapter 11. Magnetically enhanced plasma -- chapter 12. Plasma processing and related topics -- chapter 13. Atmospheric-pressure, low-temperature plasma. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Petrovic, Z., |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://www.taylorfrancis.com/books/9781482222104 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Boca Raton : |
| -- | CRC Press, |
| -- | [2015] |
| 264 #4 - | |
| -- | ©2015 |
| 336 ## - | |
| -- | text |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | rdacarrier |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Plasma engineering. |
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