Particles on surfaces: detection, adhesion and removal. (Record no. 70905)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 04484nam a2200325Ii 4500 |
| 001 - CONTROL NUMBER | |
| control field | 9780429087691 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 180611s2006 flu b ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780429087691 |
| -- | (e-book : PDF) |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 620.44 |
| 245 00 - TITLE STATEMENT | |
| Title | Particles on surfaces: detection, adhesion and removal. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | First edition. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 online resource (500 pages) |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | part Part 1: Particle Detection/ Analysis/Characterization and General Cleaning-Related Topics -- chapter Recent developments in imaging and analysis of micro- and nanosize particles and surface features -- chapter Photodigital imaging as a means of monitoring particulate contamination on surfaces -- chapter Determination of residual particles on surfaces. An updated method for particle extraction using ultrasonics -- chapter Laser inactivation of surfaces and detection of bacteria -- chapter Laser-assisted nanofabrication on surfaces using micro- and nanoparticles -- chapter Clean-then-assemble versus assemble-then-clean: Several comparisons -- chapter Development of a non-contact post-CMP cleaning process for copper -- chapter Using ozonated DI water for pre-gate cleaning -- chapter Decontamination of surrogate Pu-238 legacy wastes -- chapter Solar panel obscuration by dust and dust mitigation in the Martian atmosphere -- part Part 2: Particle Adhesion and Removal -- chapter Adhesion and friction of single micrometer-sized particles -- chapter The effect of laser-induced micro-roughness of textile fibers on adhesion and capture of micrometer-sized particles -- chapter Advances in wafer cleaning and particle removal technology -- chapter Particle removal challenges and solutions in semiconductor fabrication CMP processes -- chapter Laser cleaning of model sub-micrometer particulate contaminants from Si surfaces -- chapter Removal of particles using the combined effect of laser-induced shock wave and explosive vaporization of liquid -- chapter Particle removal by attenuated total internal reflection of laser light -- chapter Removal of sub-100-nm particles from structured substrates with C02 snow -- chapter Particle removal by dense-phase fluids using ultrasonics -- chapter Prediction of particle removal using surfactants -- chapter Removal of micrometer-size particles from solid surfaces by an impinging air jet. |
| 520 3# - SUMMARY, ETC. | |
| Summary, etc | This volume chronicles the proceedings of the 9th International Symposium on Particles on Surfaces: Detection, Adhesion and Removal held in Philadelphia, PA, June 2004. The study of particles on surfaces is crucially important in a legion of diverse technological areas, ranging from microelectronics to biomedical to space. This volume contains a total of 21 papers covering many ramifications of particles on surfaces, ranging from detection to removal. All manuscripts were rigorously peer-reviewed and revised, and properly edited before inclusion in this book. The topics covered include: imaging and analysis of macro and nanosize particles and surface features; determination of particles on surfaces; laser inactivation on surfaces; laser-assisted nanofabrication on surfaces; post-CMP cleaning process; pre-gate cleaning; solar panel obscuration in the Martian atmosphere; adhesion and friction of microsized particles; microroughness of textile fibers and capture of particles; factors affecting particle adhesion and removal; various techniques for cleaning or removal of particles from different substrates including laser, combination of laser-induced shockwave and explosive vaporization of liquid, attenuated total internal reflection of laser light, CO2 snow, use of dense phase fluids, use of surfactants and impinging air jet; and removal of sub-100-nm particles. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Congresses. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Congresses. |
| 650 #7 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Nanotechnology & MEMS. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Mittal, Kash L., |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://www.taylorfrancis.com/books/9789047418221 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Boca Raton, FL : |
| -- | CRC Press, an imprint of Taylor and Francis, |
| -- | 2006. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Particles |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Particles. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Surfaces (Technology) |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Surfaces (Technology) |
| 650 #7 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | TECHNOLOGY & ENGINEERING |
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