Crystal growth and evaluation of silicon for VLSI and ULSI / (Record no. 71827)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01657cam a2200337Ii 4500 |
| 001 - CONTROL NUMBER | |
| control field | 9780429068393 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 180331t20152015fluad ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780429068393 |
| -- | (e-book : PDF) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | (hardback) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | (paperback) |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 548.5 |
| -- | E652 |
| 100 1# - AUTHOR NAME | |
| Author | Eranna, G., |
| 245 10 - TITLE STATEMENT | |
| Title | Crystal growth and evaluation of silicon for VLSI and ULSI / |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 online resource |
| 500 ## - GENERAL NOTE | |
| Remark 1 | A Chapman and Hall book. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | 1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://www.taylorfrancis.com/books/9781482232820 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Boca Raton, FL : |
| -- | CRC Press : |
| -- | Taylor & Francis Group, |
| -- | 2015. |
| 264 #4 - | |
| -- | ©2015 |
| 336 ## - | |
| -- | text |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | rdacarrier |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Crystal growth. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Silicon. |
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