Silicon wet bulk micromachining for MEMS / (Record no. 72292)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01710cam a2200361Ii 4500 |
| 001 - CONTROL NUMBER | |
| control field | 9781315364926 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 180331t20172017si ad ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781315364926 |
| -- | (e-book : PDF) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9789814613736 |
| -- | (e-book: PDF) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781315322308 |
| -- | (e-book: Mobi) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | (hardback) |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 621.381 |
| -- | P153 |
| 100 1# - AUTHOR NAME | |
| Author | Pal, Prem, |
| 245 10 - TITLE STATEMENT | |
| Title | Silicon wet bulk micromachining for MEMS / |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 online resource |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | 1. A brief introduction of the crystal structure -- 2. Brief overview of silicon wafer manufacturing and microfabrication techniques -- 3. Isotropic etching of silicon and related materials -- 4. KOH-based anisotropic etching -- 5. TMAH-based anisotropic etching -- 6. Convex and concave corners in silicon wet bulk micromachining -- 7. Alignment of mask patterns to crystallographic directions -- 8. Simple to complex structures using wet bulk micromachining. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Sato, Kazuo, |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://www.taylorfrancis.com/books/9781315364926 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Singapore : |
| -- | Pan Stanford Publishing Pte. Ltd., |
| -- | [2017] |
| 264 #4 - | |
| -- | ©2017 |
| 336 ## - | |
| -- | text |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | rdacarrier |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microelectromechanical systems. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Micromachining. |
No items available.