Micromechanics and MEMS : (Record no. 73993)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 04444nam a2201237 i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 5273520 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220712205717.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 151221s1997 nyua ob 001 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780470545263 |
| -- | electronic |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | electronic |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 621.381 |
| 245 00 - TITLE STATEMENT | |
| Title | Micromechanics and MEMS : |
| Sub Title | classic and seminal papers to 1990 / |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 PDF (xv, 701 pages) : |
| 500 ## - GENERAL NOTE | |
| Remark 1 | "A selected reprint volume." |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | Early papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| Subject | Microelectronics. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| Subject | Microelectromechanical systems. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| Subject | Actuators. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Trimmer, W. |
| 856 42 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | New York : |
| -- | IEEE Press, |
| -- | 1997. |
| 264 #2 - | |
| -- | [Piscataqay, New Jersey] : |
| -- | IEEE Xplore, |
| -- | [1997] |
| 336 ## - | |
| -- | text |
| -- | rdacontent |
| 337 ## - | |
| -- | electronic |
| -- | isbdmedia |
| 338 ## - | |
| -- | online resource |
| -- | rdacarrier |
| 588 ## - | |
| -- | Description based on PDF viewed 12/21/2015. |
| 695 ## - | |
| -- | Accuracy |
| 695 ## - | |
| -- | Actuators |
| 695 ## - | |
| -- | Adhesives |
| 695 ## - | |
| -- | Annealing |
| 695 ## - | |
| -- | Biographies |
| 695 ## - | |
| -- | Biology |
| 695 ## - | |
| -- | Biomembranes |
| 695 ## - | |
| -- | Bridges |
| 695 ## - | |
| -- | Cavity resonators |
| 695 ## - | |
| -- | Computers |
| 695 ## - | |
| -- | Electric fields |
| 695 ## - | |
| -- | Electrodes |
| 695 ## - | |
| -- | Electron microscopy |
| 695 ## - | |
| -- | Electrostatic actuators |
| 695 ## - | |
| -- | Electrostatics |
| 695 ## - | |
| -- | Etching |
| 695 ## - | |
| -- | Fabrication |
| 695 ## - | |
| -- | Films |
| 695 ## - | |
| -- | Fingers |
| 695 ## - | |
| -- | Fluidics |
| 695 ## - | |
| -- | Fluids |
| 695 ## - | |
| -- | Force |
| 695 ## - | |
| -- | Gears |
| 695 ## - | |
| -- | Gold |
| 695 ## - | |
| -- | Harmonic analysis |
| 695 ## - | |
| -- | Heating |
| 695 ## - | |
| -- | Indexes |
| 695 ## - | |
| -- | Insulation |
| 695 ## - | |
| -- | Integrated circuit modeling |
| 695 ## - | |
| -- | Magnetic cores |
| 695 ## - | |
| -- | Magnetic levitation |
| 695 ## - | |
| -- | Manipulators |
| 695 ## - | |
| -- | Materials |
| 695 ## - | |
| -- | Mathematical model |
| 695 ## - | |
| -- | Metals |
| 695 ## - | |
| -- | Microstructure |
| 695 ## - | |
| -- | Optical sensors |
| 695 ## - | |
| -- | Polymers |
| 695 ## - | |
| -- | Q factor |
| 695 ## - | |
| -- | Resistance |
| 695 ## - | |
| -- | Resists |
| 695 ## - | |
| -- | Rotors |
| 695 ## - | |
| -- | Semiconductor process modeling |
| 695 ## - | |
| -- | Sensors |
| 695 ## - | |
| -- | Shafts |
| 695 ## - | |
| -- | Silicon |
| 695 ## - | |
| -- | Solid modeling |
| 695 ## - | |
| -- | Springs |
| 695 ## - | |
| -- | Stators |
| 695 ## - | |
| -- | Strain |
| 695 ## - | |
| -- | Structural beams |
| 695 ## - | |
| -- | Substrates |
| 695 ## - | |
| -- | Superconducting magnets |
| 695 ## - | |
| -- | Suspensions |
| 695 ## - | |
| -- | Synchronous motors |
| 695 ## - | |
| -- | Torque |
| 695 ## - | |
| -- | Valves |
| 695 ## - | |
| -- | Wire |
| 695 ## - | |
| -- | Writing |
No items available.