Process Variations in Microsystems Manufacturing (Record no. 75748)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 03576nam a22005655i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 978-3-030-40560-1 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220801213921.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 200409s2020 sz | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9783030405601 |
| -- | 978-3-030-40560-1 |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 621.381 |
| 100 1# - AUTHOR NAME | |
| Author | Huff, Michael. |
| 245 10 - TITLE STATEMENT | |
| Title | Process Variations in Microsystems Manufacturing |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 1st ed. 2020. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | XIX, 521 p. 236 illus., 24 illus. in color. |
| 490 1# - SERIES STATEMENT | |
| Series statement | Microsystems and Nanosystems, |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | Introduction -- Overview of Microsystems Manufacturing -- Process Variations in Microsystems Processing Steps -- Microsystems Metrology Methods and Associated Errors -- Process Integration and Variations in Material Properties -- Device Parameter Variations in Microsystems Manufacturing -- Quality Assurance and Control Methods Used in Microsystems Manufacturing -- Design Methods for Handling Process Variations -- Future Methods for Improved Microsystems Manufacturing Process Variations. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level. Examines and explains the basic processing steps used in MEMS fabrication; Illustrates best practices and lessons learned in manufacturing of microsystems for commercial products with detailed case studies; Reviews future methods that may provide for improved process variations. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://doi.org/10.1007/978-3-030-40560-1 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Cham : |
| -- | Springer International Publishing : |
| -- | Imprint: Springer, |
| -- | 2020. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 347 ## - | |
| -- | text file |
| -- | |
| -- | rda |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microtechnology. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microelectromechanical systems. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Manufactures. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Nanotechnology. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Electronic circuits. |
| 650 14 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Microsystems and MEMS. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Machines, Tools, Processes. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Nanotechnology. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Electronic Circuits and Systems. |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| -- | 2198-0071 |
| 912 ## - | |
| -- | ZDB-2-ENG |
| 912 ## - | |
| -- | ZDB-2-SXE |
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