Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect (Record no. 80915)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 02865nam a22005775i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 978-981-10-6165-3 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220801222552.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 170908s2018 si | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9789811061653 |
| -- | 978-981-10-6165-3 |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 670 |
| 100 1# - AUTHOR NAME | |
| Author | Cheng, Jie. |
| 245 10 - TITLE STATEMENT | |
| Title | Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 1st ed. 2018. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | XVIII, 137 p. 103 illus. |
| 490 1# - SERIES STATEMENT | |
| Series statement | Springer Theses, Recognizing Outstanding Ph.D. Research, |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material. Pursuing a systematic approach to resolve the remaining critical issues in the CMP, it first investigates the tribocorrosion properties and the material removal mechanisms of copper (Cu) and Ru in KIO4-based slurry. The thesis subsequently studies Cu/Ru galvanic corrosion from a new micro and in-situ perspective, and on this basis, seeks ways to mitigate corrosion using different slurry additives. The findings presented here constitute a significant advance in fundamental and technical investigations into the CMP, while also laying the groundwork for future research. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://doi.org/10.1007/978-981-10-6165-3 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Singapore : |
| -- | Springer Nature Singapore : |
| -- | Imprint: Springer, |
| -- | 2018. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 347 ## - | |
| -- | text file |
| -- | |
| -- | rda |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Manufactures. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Coatings. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Tribology. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Corrosion and anti-corrosives. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Electronics. |
| 650 14 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Machines, Tools, Processes. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Coatings. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Tribology. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Corrosion. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Electronics and Microelectronics, Instrumentation. |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| -- | 2190-5061 |
| 912 ## - | |
| -- | ZDB-2-ENG |
| 912 ## - | |
| -- | ZDB-2-SXE |
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