Piezoelectric MEMS Resonators (Record no. 80983)

000 -LEADER
fixed length control field 04228nam a22005895i 4500
001 - CONTROL NUMBER
control field 978-3-319-28688-4
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20220801222628.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 170110s2017 sz | s |||| 0|eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9783319286884
-- 978-3-319-28688-4
082 04 - CLASSIFICATION NUMBER
Call Number 621.381
245 10 - TITLE STATEMENT
Title Piezoelectric MEMS Resonators
250 ## - EDITION STATEMENT
Edition statement 1st ed. 2017.
300 ## - PHYSICAL DESCRIPTION
Number of Pages XII, 424 p. 231 illus., 127 illus. in color.
490 1# - SERIES STATEMENT
Series statement Microsystems and Nanosystems,
505 0# - FORMATTED CONTENTS NOTE
Remark 2 AIN Thin Film Processing and Basic Properties -- Lead Zirconate Titanate (PZT) for M/NEMS -- Gallium Nitride for M/NEMS -- Lithium Niobate for M/NEMS Resonators -- Quality Factor and Coupling in Piezoelectric MEMS Resonators -- Flexural Piezoelectric Resonators -- Laterally Vibrating Piezoelectric MEMS Resonators -- BAW Piezoelectric Resonators -- Shear Piezoelectric MEMS Resonators -- Temperature Compensation of Piezo-MEMS Resonators -- Computational Modeling Challenges -- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators -- Reliability and Quality Assessment (Stability and Packages) -- Large Volume Testing and Calibration -- High Frequency Oscillators for Mobile Devices -- BAW Filters and Duplexers for Mobile Communication. .
520 ## - SUMMARY, ETC.
Summary, etc This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
700 1# - AUTHOR 2
Author 2 Bhugra, Harmeet.
700 1# - AUTHOR 2
Author 2 Piazza, Gianluca.
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier https://doi.org/10.1007/978-3-319-28688-4
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type eBooks
264 #1 -
-- Cham :
-- Springer International Publishing :
-- Imprint: Springer,
-- 2017.
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-- text
-- txt
-- rdacontent
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-- computer
-- c
-- rdamedia
338 ## -
-- online resource
-- cr
-- rdacarrier
347 ## -
-- text file
-- PDF
-- rda
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Electronics.
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Microtechnology.
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Microelectromechanical systems.
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Nanotechnology.
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Optical materials.
650 14 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Electronics and Microelectronics, Instrumentation.
650 24 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Microsystems and MEMS.
650 24 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Nanotechnology.
650 24 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Optical Materials.
830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE
-- 2198-0071
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-- ZDB-2-ENG
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-- ZDB-2-SXE

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