Wafer Fabrication : (Record no. 84583)
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000 -LEADER | |
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fixed length control field | 04408nam a22008415i 4500 |
001 - CONTROL NUMBER | |
control field | 9783110487473 |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20240730161918.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 210830t20182018gw fo d z eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
ISBN | 9783110487473 |
041 0# - LANGUAGE CODE | |
Language code of text/sound track or separate title | |
082 04 - CLASSIFICATION NUMBER | |
Call Number | 621.39/5 |
100 1# - AUTHOR NAME | |
Author | Zhang, Jie, |
245 10 - TITLE STATEMENT | |
Title | Wafer Fabrication : |
Sub Title | Automatic Material Handling System / |
300 ## - PHYSICAL DESCRIPTION | |
Number of Pages | 1 online resource (XII, 272 p.) |
520 ## - SUMMARY, ETC. | |
Summary, etc | This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management. |
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
General subdivision | Automatic control. |
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
General subdivision | Automatic control. |
700 1# - AUTHOR 2 | |
Author 2 | Huazhong University of Science and Technology,. |
856 40 - ELECTRONIC LOCATION AND ACCESS | |
Uniform Resource Identifier | https://doi.org/10.1515/9783110487473 |
856 40 - ELECTRONIC LOCATION AND ACCESS | |
Uniform Resource Identifier | https://www.degruyter.com/isbn/9783110487473 |
856 42 - ELECTRONIC LOCATION AND ACCESS | |
Uniform Resource Identifier | https://www.degruyter.com/cover/covers/9783110487473.jpg |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | eBooks |
264 #1 - | |
-- | Berlin ; |
-- | Boston : |
-- | De Gruyter, |
-- | [2018] |
264 #4 - | |
-- | ©2018 |
336 ## - | |
-- | text |
-- | txt |
-- | rdacontent |
337 ## - | |
-- | computer |
-- | c |
-- | rdamedia |
338 ## - | |
-- | online resource |
-- | cr |
-- | rdacarrier |
347 ## - | |
-- | text file |
-- | |
-- | rda |
588 0# - | |
-- | Description based on online resource; title from PDF title page (publisher's Web site, viewed 30. Aug 2021) |
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Manufacturing processes |
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Semiconductor wafers |
650 #7 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
-- | Technology & Engineering / Manufacturing. |
912 ## - | |
-- | 978-3-11-060402-3 EBOOK PACKAGE Engineering, Computer Sciences 2018 English |
-- | 2018 |
912 ## - | |
-- | 978-3-11-060425-2 EBOOK PACKAGE COMPLETE 2018 English |
-- | 2018 |
912 ## - | |
-- | 978-3-11-071955-0 DG Plus eBook-Package 2018 |
-- | 2018 |
912 ## - | |
-- | EBA_BACKALL |
912 ## - | |
-- | EBA_CL_CHCOMSGSEN |
912 ## - | |
-- | EBA_DGALL |
912 ## - | |
-- | EBA_EBACKALL |
912 ## - | |
-- | EBA_EBKALL |
912 ## - | |
-- | EBA_ECL_CHCOMSGSEN |
912 ## - | |
-- | EBA_EEBKALL |
912 ## - | |
-- | EBA_ESTMALL |
912 ## - | |
-- | EBA_STMALL |
912 ## - | |
-- | GBV-deGruyter-alles |
912 ## - | |
-- | PDA12STME |
912 ## - | |
-- | PDA13ENGE |
912 ## - | |
-- | PDA18STMEE |
912 ## - | |
-- | PDA5EBK |
912 ## - | |
-- | ZDB-23-DEI |
-- | 2018 |
912 ## - | |
-- | ZDB-23-DGG |
-- | 2017 |
No items available.