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Microsystems and MEMS. (Topical Term)

Preferred form: Microsystems and MEMS.

Machine generated authority record.

Work cat.: (OSt): Kottapalli, Ajay Giri Prakash. author. aut http://id.loc.gov/vocabulary/relators/aut 41386, Self-Powered and Soft Polymer MEMS/NEMS Devices