Normal view MARC view

Microsystems and MEMS. (Topical Term)

Preferred form: Microsystems and MEMS.

Machine generated authority record.

Work cat.: (OSt): Zhang, Xiao-Sheng. author. aut http://id.loc.gov/vocabulary/relators/aut 61233, Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting