Normal view
MARC view
Entry Personal Name
001 - CONTROL NUMBER
- control field: 69542
003 - CONTROL NUMBER IDENTIFIER
- control field: OSt
005 - DATE AND TIME OF LATEST TRANSACTION
- control field: 20230516165952.0
008 - FIXED-LENGTH DATA ELEMENTS
- fixed length control field: 230516|| aca||aabn | a|a d
040 ## - CATALOGING SOURCE
- Original cataloging agency: OSt
- Transcribing agency: OSt
100 ## - HEADING--PERSONAL NAME
- Personal name: Babu, S. V.,
- Relator term: editor.
670 ## - SOURCE DATA FOUND
- Source citation: Work cat.: (OSt): Advances in chemical mechanical planarization (CMP) /