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HANDBOOK OF SILICON BASED MEMS MATERIALS AND TECHNOLOGY

By: LINDROOS, V. & OTHERS.
Material type: materialTypeLabelBookPublisher: BURLINGTON Elsevier 2010Description: xxxii+636p., 28x22Cm.ISBN: 978081551594.DDC classification: 621.381 L7484
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621.381 L7484 (Browse shelf) Available 093124

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