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Micromechanics and MEMS : classic and seminal papers to 1990 / edited by William S. Trimmer.

Contributor(s): Trimmer, W | John Wiley & Sons [publisher.] | Institute of Electrical and Electronics Engineers | IEEE Xplore (Online service) [distributor.].

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Contents:

Early papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology.

Summary: Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.

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"A selected reprint volume."

Includes bibliographical references and index.

Restricted to subscribers or individual electronic text purchasers.

Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.

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Micromechanics and MEMS : classic and seminal papers to 1990 / edited by William S. Trimmer.

Contributor(s): Trimmer, W | John Wiley & Sons [publisher.] | Institute of Electrical and Electronics Engineers | IEEE Xplore (Online service) [distributor.].