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Nanofabrication by ion-beam sputtering : fundamentals and applications / edited by Tapobrata Som, Dinakar Kanjilal.

Contributor(s): Som, Tapobrata | Kanjilal, Dinakar.
Material type: materialTypeLabelBookPublisher: Singapore : Pan Stanford Pub., 2013Description: 1 online resource (xix, 335 pages).ISBN: 9780429086540.Subject(s): Nanotechnology | Materials scienceAdditional physical formats: Print version: : No titleDDC classification: 620.5 Online resources: Click here to view.
Contents:
1. Elements of sputtering theory / Peter Sigmund -- 2. Sputter-ripple formation on flat and rough surfaces : a case study with Si 41 / Safiul Alam Mollick and Debabrata Ghose -- 3. Low-energy ion-induced pattern formation in Si-Ge alloy / Subhendu Sarkar -- 4. Patterning of ionic insulator surfaces with low-energy ion beams / Franciszek Krok. [et al.] -- 5. Nanostructures on thin films by keV ion beams / Prasanta Karmakar -- 6. Surface nanopatterns on Si(100) by normal-incidence ion sputtering with metal incorporation / Raul Gago. [et al.] -- 7. Kinetic Monte Carlo simulations of low-energy ion-induced surface patterning / Wai-Lun Chan and Eric Chason -- 8. From cascades to patterns : a Monte Carlo approach / Reiner Kree and Taha Yasseri -- 9. Understanding surface patterning by lattice gas models / Geza Odor, Bartosz Liedke, and Karl-Heinz Heinig -- 10. Applications of ion beam patterned substrates in plasmonics / Mukesh Ranjan, Thomas W.H. Oates, and Stefan Facsko.
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1. Elements of sputtering theory / Peter Sigmund -- 2. Sputter-ripple formation on flat and rough surfaces : a case study with Si 41 / Safiul Alam Mollick and Debabrata Ghose -- 3. Low-energy ion-induced pattern formation in Si-Ge alloy / Subhendu Sarkar -- 4. Patterning of ionic insulator surfaces with low-energy ion beams / Franciszek Krok. [et al.] -- 5. Nanostructures on thin films by keV ion beams / Prasanta Karmakar -- 6. Surface nanopatterns on Si(100) by normal-incidence ion sputtering with metal incorporation / Raul Gago. [et al.] -- 7. Kinetic Monte Carlo simulations of low-energy ion-induced surface patterning / Wai-Lun Chan and Eric Chason -- 8. From cascades to patterns : a Monte Carlo approach / Reiner Kree and Taha Yasseri -- 9. Understanding surface patterning by lattice gas models / Geza Odor, Bartosz Liedke, and Karl-Heinz Heinig -- 10. Applications of ion beam patterned substrates in plasmonics / Mukesh Ranjan, Thomas W.H. Oates, and Stefan Facsko.

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