Micro- and nano-scale sensors and transducers / Ezzat G. Bakhoum.
By: Bakhoum, Ezzat G [author.]
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Material type: 
BookPublisher: Boca Raton : CRC Press, [2015]Copyright date: ©2015Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9780429170492.Subject(s): Microelectromechanical systemsAdditional physical formats: Print version: : No titleDDC classification: 621.381 Online resources: Click here to view.
Contents:
1. Pressure sensors -- 2. Motion and acceleration sensors -- 3. Gas and smoke sensors -- 4. Moisture sensors -- 5. Optoelectronic and photonic sensors -- 6. Biological, chemical, and lab on a chip sensors -- 7. Electric, magnetic, and RF/microwave sensors -- 8. Integrated sensor/actuator units and special purpose sensors.
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1. Pressure sensors -- 2. Motion and acceleration sensors -- 3. Gas and smoke sensors -- 4. Moisture sensors -- 5. Optoelectronic and photonic sensors -- 6. Biological, chemical, and lab on a chip sensors -- 7. Electric, magnetic, and RF/microwave sensors -- 8. Integrated sensor/actuator units and special purpose sensors.
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