MEMS and nanotechnology for gas sensors / Sunipa Roy, Chandan Kumar Sarkar.
By: Roy, Sunipa [author.]
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Contributor(s): Sarkar, Chandan Kumar [author.]
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Material type: ![materialTypeLabel](/opac-tmpl/lib/famfamfam/BK.png)
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Contents:
section 1. Fabrication procedure -- section 2. Sensor applications.
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section 1. Fabrication procedure -- section 2. Sensor applications.
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