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MEMS : fundamental technology and applications / editors, Vikas Choudhary, Krzysztof Iniewski.

Contributor(s): Choudhary, Vikas | Iniewski, Krzysztof.
Material type: materialTypeLabelBookSeries: Devices, circuits, and systems: Publisher: Boca Raton : Taylor & Francis, 2013Description: 1 online resource (xxii, 456 pages).ISBN: 9781315216393; 9781351823593; 9781466515826.Subject(s): Microelectromechanical systems | Microelectronic packagingAdditional physical formats: Print version: : No titleDDC classification: 621.381 Online resources: Click here to view.
Contents:
section 1. Breakthrough technology -- section 2. MEMS-based novel applications.
Summary: Written by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems-- Provided by publisher.
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section 1. Breakthrough technology -- section 2. MEMS-based novel applications.

Written by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems-- Provided by publisher.

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