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Levitation Micro-Systems [electronic resource] : Applications to Sensors and Actuators / by Kirill Poletkin.

By: Poletkin, Kirill [author.].
Contributor(s): SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: Microsystems and Nanosystems: Publisher: Cham : Springer International Publishing : Imprint: Springer, 2021Edition: 1st ed. 2021.Description: IX, 174 p. 93 illus., 91 illus. in color. online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9783030589080.Subject(s): Microtechnology | Microelectromechanical systems | Materials | Detectors | Microsystems and MEMS | Sensors and biosensorsAdditional physical formats: Printed edition:: No title; Printed edition:: No title; Printed edition:: No titleDDC classification: 621.381 Online resources: Click here to access online
Contents:
Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes.
In: Springer Nature eBookSummary: This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
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Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes.

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

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