Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester [electronic resource] / by Shanky Saxena, Ritu Sharma, B. D. Pant.
By: Saxena, Shanky [author.]
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Contributor(s): Sharma, Ritu [author.] | Pant, B. D [author.] | SpringerLink (Online service).
Material type: 
BookSeries: Energy Systems in Electrical Engineering: Publisher: Singapore : Springer Nature Singapore : Imprint: Springer, 2021Edition: 1st ed. 2021.Description: XXI, 190 p. 225 illus., 214 illus. in color. online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9789811606069.Subject(s): Electronics | Electronic circuits | Microtechnology | Microelectromechanical systems | Energy harvesting | Electronics and Microelectronics, Instrumentation | Electronic Circuits and Systems | Microsystems and MEMS | Energy HarvestingAdditional physical formats: Printed edition:: No title; Printed edition:: No title; Printed edition:: No titleDDC classification: 621.381 Online resources: Click here to access online Chapter-1: Introduction -- Chapter 2: Literature Review -- Chapter 3: Design, Modeling and Comparison of Piezoelectric Energy Harvesters -- Chapter 4: Design and FEM Simulation of Guided Beam Piezoelectric Energy Harvester -- Chapter 5: Fabrication of Guided Beam Piezoelectric Energy Harvester -- Chapter 6: Testing and Characterization of Guided Beam Piezoelectric Energy Harvester -- Chapter 7: Conclusion and Future Scope.
This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of this volume illustrates key insight technologies through images. The book showcases different technologies for energy harvesting and the importance of energy harvesting in wireless sensor networks. The design, simulation, and comparison of three types of structures – single beam cantilever structure, cantilever array structure, and guided beam structure have also been reported in one of the chapters. In this volume, an elaborate characterization of two-beam and four-beam fabricated devices has been carried out. This characterization includes structural, material, morphological, topological, dynamic, and electrical characterization of the device. The volume is very concise, easy to understand, and contains colored images to understand the details of each process. .
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