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Front Cover -- Surface Metrology for Micro- and Nanofabrication -- Copyright Page -- Dedication -- Contents -- Preface -- 1 Noncontact scanning electrostatic force microscope -- 1.1 Introduction -- 1.2 Principle of electrostatic force microscope for surface profile measurement -- 1.3 Instrumentation of electrostatic force microscope -- 1.3.1 Instrument configuration -- 1.3.2 Electrostatic force microscope probe fabrication -- 1.3.3 Electrostatic force microscope electronics -- 1.4 Characterization of the electrostatic force microscope -- 1.4.1 Tip-to-sample distance measurement

1.4.2 Measurement of surface topography -- 1.4.3 The vertical reciprocating scan mode -- 1.5 Summary -- References -- 2 Quartz tuning fork atomic force microscope -- 2.1 Introduction -- 2.2 Tungsten probe QTF-AFM -- 2.2.1 Self-oscillation QTF-AFM -- 2.2.2 External-oscillation QTF-AFM -- 2.3 Glass probe QTF-AFM -- 2.3.1 Fabrication of the glass probe -- 2.3.2 Optimization of the QTF glass probe -- 2.3.3 Surface profile measurement by the QTF glass probe -- 2.4 Summary -- References -- 3 Micropipette ball probing system -- 3.1 Introduction -- 3.2 Fabrication of the micropipette probe

3.3 The probing system -- 3.4 Measurement of microslit -- 3.5 Summary -- References -- 4 Low-force elastic beam surface profiler -- 4.1 Introduction -- 4.2 Cantilever beam surface profiler -- 4.3 Both ends supported beam surface profiler -- 4.4 Rotary die cutter edge profile measurement -- 4.5 Summary -- References -- 5 Linear-scan micro roundness measuring machine -- 5.1 Introduction -- 5.2 The stitching linear-scan method -- 5.3 Linear-scan micro roundness measuring machine -- 5.4 Improved setup with a round positioning jig -- 5.5 Summary -- References -- 6 Micro-gear measuring machine

6.1 Introduction -- 6.2 The micro-gear measuring machine -- 6.3 Self-calibration and compensation of setting errors -- 6.4 Internal micro-gear measurement -- 6.5 Summary -- References -- 7 On-machine length gauge surface profiler -- 7.1 Introduction -- 7.2 General issues in on-machine measurement -- 7.3 Satellite mirror surface profiler -- 7.4 Scroll surface profiler -- 7.5 Summary -- References -- 8 On-machine air-bearing surface profiler -- 8.1 Introduction -- 8.2 Horizontal air-bearing profiler -- 8.3 Vertical air-bearing profiler -- 8.4 Dynamic behavior of air-bearing profiler -- 8.5 Summary

References-9 On-machine atomic force microscope-9.1 Introduction-9.2 On-machine spiral scan atomic force microscope-9.3 On-machine automatic alignment atomic force microscope-9.4 Summary-References-10 On-machine roll profiler-10.1 Introduction-10.2 On-machine two-probe profiler-10.3 On-machine four-probe profiler-10.4 Summary-References-11 In-process fast tool servo profiler-11.1 Introduction-11.2 Force sensor-integrated fast tool servo-11.3 In-process surface profile measurement-11.4 In-process tool setting-11.5 Summary-References.

12 Self-calibration of probe tip radius and cutting edge sharpness.