MADOU, M.J. <br/><br/>
FUNDAMENTALS OF MICROFABRICATION: SCIENCE OF MINIATURIZATION 

 - 2 
 - Boca Raton  CRC  2001 
 - 723p.,28X22Cms. 
<br/><br/><label>ISBN: </label>0849308267 
<br/><br/><label>Dewey Class. No.: </label>621.381952 M182