HSU, T <br/><br/>
MEMS AND MICROSYSTEMS:DESIGN AND MANUFACTURE 

 - NEW DELHI  Tata McGraw-Hill  2003 
 - xii+436p.,24X19Cms. 
<br/><br/><label>ISBN: </label>007048709X 
<br/><br/><label>Dewey Class. No.: </label>621.381 H973