LYSHEVSKI, S.E <br/><br/>
NANO AND MICROELECTROMECHANICAL SYSTEMS: FUNDAMENTALS OF NANO AND MICROENGINEERI 

 - 2 
 - Boca Raton  CRC  2005 
 - 722p., 26X18Cms. 
<br/><br/><label>ISBN: </label>0849328381 
<br/><br/><label>Dewey Class. No.: </label>621.381 L996