JACKSON, M.J <br/><br/>
MICROFABRICATION AND NANOMANUFACTURING 

 - Boca Raton  CRC  2006 
 - 401p.,22x16Cms 
<br/><br/><label>ISBN: </label>0824724313 
<br/><br/><label>Dewey Class. No.: </label>621.3 J12