PAIK, U. <br/><br/>
NANOPARTICLE ENGINEERING OF CHEMICAL-MECHANICAL PLANARIZATION: FABRICATION OF NE 

 - Boca Raton  CRC  2009 
 - xiii+191p.,24x16Cms. 
<br/><br/><label>ISBN: </label>978142005911 
<br/><br/><label>Dewey Class. No.: </label>620.5 P142