LINDROOS, V. & OTHERS <br/><br/>
HANDBOOK OF SILICON BASED MEMS MATERIALS AND TECHNOLOGY 

 - BURLINGTON  Elsevier  2010 
 - xxxii+636p., 28x22Cm 
<br/><br/><label>ISBN: </label>978081551594 
<br/><br/><label>Dewey Class. No.: </label>621.381 L7484