LEE, K.B. <br/><br/>
PRINCIPLES OF MICROELECTROMECHANICAL SYSTEMS 

 - New Jersey  Wiley  2011 
 - xii+667p., 24x16Cms. 
<br/><br/><label>ISBN: </label>978047046634 
<br/><br/><label>Dewey Class. No.: </label>621.381 L477