COMPBELL, S.A. <br/><br/>
SCIENCE & ENGINEERING OF MICROELECTRONICS FABRICATION 

 - 2 
 - NEW YORK  Oxford University Press  2007 
 - xiv+603p.,24x17Cms. 
<br/><br/><label>ISBN: </label>0198084808 
<br/><br/><label>Dewey Class. No.: </label>621.38152 C187