HSU, T.R <br/><br/>
MEMS AND MICROSYSTEMS DESIGN AND MANUFACTURE 

 - NEW DELHI  Tata McGraw-Hill  2002 
 - xii+436p., 
<br/><br/><label>ISBN: </label>0-07-048709-X 
<br/><br/><label>Dewey Class. No.: </label>621.381 H973