Cao, Imin, <br/><br/>
Wafer manufacturing :  shaping of single crystal silicon wafers / 
by Imin Cao, Milind Bhagavat. 
 - 1 online resource. 
<br/><br/><label>ISBN: </label>9781118696224 1118696220 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor wafers.<br/>Semiconductor wafers.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7871.85 
<br/><br/><label>Dewey Class. No.: </label>621.38152