Bakhoum, Ezzat G., 1963,

Micro- and nano-scale sensors and transducers / Ezzat G. Bakhoum. - 1 online resource

1. Pressure sensors -- 2. Motion and acceleration sensors -- 3. Gas and smoke sensors -- 4. Moisture sensors -- 5. Optoelectronic and photonic sensors -- 6. Biological, chemical, and lab on a chip sensors -- 7. Electric, magnetic, and RF/microwave sensors -- 8. Integrated sensor/actuator units and special purpose sensors.

9780429170492

10.1201/b18301 doi


Microelectromechanical systems.

TK7875 / .M53 2015

621.381 / B168