Makabe, T. <br/><br/>
Plasma electronics :  applications in microelectronic device fabrication / 
Toshiaki Makabe, Zoran Lj. Petrovic. 
 - Second edition. 
 - 1 online resource 
<br/><br/>chapter 1. Introduction -- chapter 2. Phenomenological description of the charged particle transport -- chapter 3. Macroscopic plasma characteristics -- chapter 4. Elementary processes in gas phase and on surfaces -- chapter 5. The Boltzmann equation and transport equations of charged particles -- chapter 6. General properties of charged particle transport in gases -- chapter 7. Modeling of nonequilibrium (low temperature) plasmas -- chapter 8. Numerical procedure of modeling -- chapter 9. Capacitively coupled plasma -- chapter 10. Inductively coupled plasma -- chapter 11. Magnetically enhanced plasma -- chapter 12. Plasma processing and related topics -- chapter 13. Atmospheric-pressure, low-temperature plasma. 
<br/><br/><label>ISBN: </label>9781482222104 
<br/><br/><label>Standard No.: </label>10.1201/b17322   doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering.
<br/><br/><label>LC Class. No.: </label>TA2020  / .M35 2015 
<br/><br/><label>Dewey Class. No.: </label>621.044  / M235