Ayers, John E.,

Heteroepitaxy of semiconductors : theory, growth, and characterization / John E. Ayers, University of Connecticut, Storrs, USA, Tedi Kujofsa, University of Connecticut, Storrs, USA, Paul Rango, University of Connecticut, Storrs, USA, Johanna E - Second edition. - 1 online resource

1. Introduction -- 2. Properties of semiconductors -- 3. Heteroepitaxial growth -- 4. Surface and chemical considerations in heteroepitaxy -- 5. Mismatched heteroepitaxial growth and strain relaxation : I. Uniform layers -- 6. Mismatched heteroepitaxial growth and strain relaxation : II. Graded layers and multilayered structures -- 7. Characterization of heteroepitaxial layers -- 8. Defect engineering in heteroepitaxial material -- 9. Metamorphic devices.

9781315372440 9781482254365 9781315336114

10.1201/9781315372440 doi


Compound semiconductors.
Epitaxy.

QC611.8.C64 / A94 2017

537.6226 / A977