Heteroepitaxy of semiconductors : theory, growth, and characterization /
John E. Ayers, University of Connecticut, Storrs, USA, Tedi Kujofsa, University of Connecticut, Storrs, USA, Paul Rango, University of Connecticut, Storrs, USA, Johanna E
- Second edition.
- 1 online resource
1. Introduction -- 2. Properties of semiconductors -- 3. Heteroepitaxial growth -- 4. Surface and chemical considerations in heteroepitaxy -- 5. Mismatched heteroepitaxial growth and strain relaxation : I. Uniform layers -- 6. Mismatched heteroepitaxial growth and strain relaxation : II. Graded layers and multilayered structures -- 7. Characterization of heteroepitaxial layers -- 8. Defect engineering in heteroepitaxial material -- 9. Metamorphic devices.