Particles on surfaces: detection, adhesion and removal. Volume 9 /
edited by Kash L. Mittal.
- First edition.
- 1 online resource (500 pages)
part Part 1: Particle Detection/ Analysis/Characterization and General Cleaning-Related Topics -- chapter Recent developments in imaging and analysis of micro- and nanosize particles and surface features -- chapter Photodigital imaging as a means of monitoring particulate contamination on surfaces -- chapter Determination of residual particles on surfaces. An updated method for particle extraction using ultrasonics -- chapter Laser inactivation of surfaces and detection of bacteria -- chapter Laser-assisted nanofabrication on surfaces using micro- and nanoparticles -- chapter Clean-then-assemble versus assemble-then-clean: Several comparisons -- chapter Development of a non-contact post-CMP cleaning process for copper -- chapter Using ozonated DI water for pre-gate cleaning -- chapter Decontamination of surrogate Pu-238 legacy wastes -- chapter Solar panel obscuration by dust and dust mitigation in the Martian atmosphere -- part Part 2: Particle Adhesion and Removal -- chapter Adhesion and friction of single micrometer-sized particles -- chapter The effect of laser-induced micro-roughness of textile fibers on adhesion and capture of micrometer-sized particles -- chapter Advances in wafer cleaning and particle removal technology -- chapter Particle removal challenges and solutions in semiconductor fabrication CMP processes -- chapter Laser cleaning of model sub-micrometer particulate contaminants from Si surfaces -- chapter Removal of particles using the combined effect of laser-induced shock wave and explosive vaporization of liquid -- chapter Particle removal by attenuated total internal reflection of laser light -- chapter Removal of sub-100-nm particles from structured substrates with C02 snow -- chapter Particle removal by dense-phase fluids using ultrasonics -- chapter Prediction of particle removal using surfactants -- chapter Removal of micrometer-size particles from solid surfaces by an impinging air jet.
This volume chronicles the proceedings of the 9th International Symposium on Particles on Surfaces: Detection, Adhesion and Removal held in Philadelphia, PA, June 2004. The study of particles on surfaces is crucially important in a legion of diverse technological areas, ranging from microelectronics to biomedical to space. This volume contains a total of 21 papers covering many ramifications of particles on surfaces, ranging from detection to removal. All manuscripts were rigorously peer-reviewed and revised, and properly edited before inclusion in this book. The topics covered include: imaging and analysis of macro and nanosize particles and surface features; determination of particles on surfaces; laser inactivation on surfaces; laser-assisted nanofabrication on surfaces; post-CMP cleaning process; pre-gate cleaning; solar panel obscuration in the Martian atmosphere; adhesion and friction of microsized particles; microroughness of textile fibers and capture of particles; factors affecting particle adhesion and removal; various techniques for cleaning or removal of particles from different substrates including laser, combination of laser-induced shockwave and explosive vaporization of liquid, attenuated total internal reflection of laser light, CO2 snow, use of dense phase fluids, use of surfactants and impinging air jet; and removal of sub-100-nm particles.