Yamada, I. <br/><br/>
Materials processing by cluster ion beams :  history, technology, and applications / 
Isao Yamada. 
 - 1 online resource 
<br/><br/>chapter 1. Ion beam technology : overview and history -- chapter 2. History and milestones of cluster beam development -- chapter 3. Development of cluster beam sources for solid materials -- chapter 4. Gas cluster ion beam equipment -- chapter 5. Cluster ion-solid surface interaction kinetics -- chapter 6. Cluster ion beam sputtering -- chapter 7. Cluster ion implantation -- chapter 8. Cluster ion beam-assisted deposition -- chapter 9. Applications -- chapter 10. Conclusions. 
<br/><br/><label>ISBN: </label>9780429194573 9781498733878 
<br/><br/><label>Standard No.: </label>10.1201/b18745   doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Complex ions.
<br/><br/><label>LC Class. No.: </label>QD471  / .Y36 2016 
<br/><br/><label>Dewey Class. No.: </label>541.224  / Y192