Silicon wet bulk micromachining for MEMS /
Silicon wet bulk micromachining for microelectromechanical systems
Prem Pal, Kazuo Sato.
- 1 online resource
1. A brief introduction of the crystal structure -- 2. Brief overview of silicon wafer manufacturing and microfabrication techniques -- 3. Isotropic etching of silicon and related materials -- 4. KOH-based anisotropic etching -- 5. TMAH-based anisotropic etching -- 6. Convex and concave corners in silicon wet bulk micromachining -- 7. Alignment of mask patterns to crystallographic directions -- 8. Simple to complex structures using wet bulk micromachining.