Micromechanics and MEMS :  classic and seminal papers to 1990 / 
edited by William S. Trimmer. 
 - 1 PDF (xv, 701 pages) :  illustrations. 
<br/><br/> "A selected reprint volume." 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>Early papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology. 
<br/><br/> Restricted to subscribers or individual electronic text purchasers. 
<br/><br/> Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. 
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<br/><br/><br/>Mode of access: World Wide Web 
<br/><br/><label>ISBN: </label>9780470545263 
<br/><br/><label>Standard No.: </label>10.1109/9780470545263  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Microelectromechanical systems.<br/>Actuators.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7874  / .M4876 1997eb 
<br/><br/><label>Dewey Class. No.: </label>621.381