Lucyszyn, S.

Advanced RF MEMS / Stepan Lucyszyn. - 1 online resource (xxviii, 412 pages) : digital, PDF file(s). - The Cambridge RF and microwave engineering series . - Cambridge RF and microwave engineering series. .

Title from publisher's bibliographic system (viewed on 05 Oct 2015).

Introduction S. Lucyszyn -- Electromechanical modelling of electrostatic actuators D. Elata and V. Leus -- Switches and their fabrication technologies T. Lisec -- Niche switch technologies S. Lucyszyn, S. Pranonsatit, J.Y. Choi and A. Holmes -- Reliability I. De Wolf -- Dielectric charging G. Papaioannou -- Stress and thermal characterisation R.Y. Fillit and R. Fortunier -- High power handling F. Coccetti and R. Plana -- Packaging H. Tilmans, A. Jourdain and P. De Moor -- Impedance tuners and tuneable filters A. Pothier and T. Va ; ha ;-Heikkila -- Phase shifters and tunable delay lines L. Dussopt -- Reconfigurable architectures T. Va ;ha ;-Heikkila -- Industry roadmap for RF MEMS J. Bouchaud, R. Sorrentino, B. Knoblich, H. Tilmans and F. Coccetti.

An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation

9780511781995 (ebook)


Radio frequency microelectromechanical systems.

TK7875 / .L83 2010

621.381