Senturia, Stephen D.  <br/><br/>
Microsystem Design 

 - New York  Springer  2001 
 - p.689 
<br/><br/><label>ISBN: </label>9781475774580 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microfabrication<br/>Elasticity<br/>Fluids<br/>Noise
<br/><br/><label>Dewey Class. No.: </label>621.381 S28M