Handbook of optical dimensional metrology / edited by Kevin Harding.
Contributor(s): Harding, Kevin G
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Material type: 
BookSeries: Series in optics and optoelectronics (CRC Press): Publisher: Boca Raton : CRC Press, 2013Description: 1 online resource (xiii, 492 pages).ISBN: 9780429064739.Subject(s): Measurement -- Handbooks, manuals, etc | Optical measurements -- Handbooks, manuals, etc | Dimensional analysis -- Handbooks, manuals, etcAdditional physical formats: Print version: : No titleDDC classification: 530.8 Online resources: Click here to view. A Taylor & Francis book.
pt. 1. Optical metrology : introduction -- pt. 2. Optical metrology of larger objects -- pt. 3. Optical metrology of medium size objects -- pt. 4. Optical micro-metrology of small objects -- pt. 5. Advanced optical micro-metrology methods.
The need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices used in modern optical dimensional metrology. An essential desk reference for metrologists and engineers, the book incorporates data tables and a multitude of available techniques-- Provided by publisher.
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