Heteroepitaxy of semiconductors : theory, growth, and characterization / John E. Ayers, University of Connecticut, Storrs, USA, Tedi Kujofsa, University of Connecticut, Storrs, USA, Paul Rango, University of Connecticut, Storrs, USA, Johanna E
By: Ayers, John E [author.]
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Contributor(s): Kujofsa, Tedi [author.] | Rango, Paul [author.] | Raphael, Johanna E [author.].
Material type: 
BookPublisher: Boca Raton : Taylor & Francis Group, [2017]Copyright date: ©2017Edition: Second edition.Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9781315372440; 9781482254365; 9781315336114.Subject(s): Compound semiconductors | EpitaxyAdditional physical formats: Print version: : No titleDDC classification: 537.6226 Online resources: Click here to view.
Contents:
1. Introduction -- 2. Properties of semiconductors -- 3. Heteroepitaxial growth -- 4. Surface and chemical considerations in heteroepitaxy -- 5. Mismatched heteroepitaxial growth and strain relaxation : I. Uniform layers -- 6. Mismatched heteroepitaxial growth and strain relaxation : II. Graded layers and multilayered structures -- 7. Characterization of heteroepitaxial layers -- 8. Defect engineering in heteroepitaxial material -- 9. Metamorphic devices.
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1. Introduction -- 2. Properties of semiconductors -- 3. Heteroepitaxial growth -- 4. Surface and chemical considerations in heteroepitaxy -- 5. Mismatched heteroepitaxial growth and strain relaxation : I. Uniform layers -- 6. Mismatched heteroepitaxial growth and strain relaxation : II. Graded layers and multilayered structures -- 7. Characterization of heteroepitaxial layers -- 8. Defect engineering in heteroepitaxial material -- 9. Metamorphic devices.
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