000 00330nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a0387540571
082 _a541.3453 K82
100 _aKONUMA,M
245 0 _aFILM DEPOSITION BY PLASMA TEACHNIQUES
260 _aNEW YORK
_bSpringer
_c1992
300 _a24X16
942 _cBK
_2DDC
999 _c23062
_d23062