000 | 00330nam a2200133Ia 4500 | ||
---|---|---|---|
008 | 190711s9999 xx 000 0 und d | ||
020 | _a0387540571 | ||
082 | _a541.3453 K82 | ||
100 | _aKONUMA,M | ||
245 | 0 | _aFILM DEPOSITION BY PLASMA TEACHNIQUES | |
260 |
_aNEW YORK _bSpringer _c1992 |
||
300 | _a24X16 | ||
942 |
_cBK _2DDC |
||
999 |
_c23062 _d23062 |