000 00329nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a0412465906
082 _a533.5 D 345
100 _aDELCHAR, T.A
245 0 _aVACUUM PHYSICS AND TECHNIQUES
260 _aLONDON
_bChapman & Hall
_c1993
300 _a22X14
942 _cBK
_2DDC
999 _c23524
_d23524