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020 _a0125330139
082 _a538.401 F825
100 _aFRANCOMBE,M.H
245 0 _aPHYSICS OF THIN FILMS: ADVANCES IN RESEARCH AND DEVELOPMENT VOL.18: PLASMA SOURC
260 _aNEW YORK
_bACADEMIC
_c1987
300 _a23X16
942 _cBK
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999 _c25454
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